Polysilicon MEMS Sensors: Sensitivity to Sub-Micron Imperfections
نویسندگان
چکیده
منابع مشابه
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PROEFSCHRIFT ter verkrijging van de graad van doctor aan de Technische Universiteit Delft, op gezag van de Rector Magnificus Prof.dr.ir. J.T. Fokkema, voorzitter van het College voor Promoties, in het openbaar te verdedigen op maandag 3 november om 15:00 uur. Het onderzoek beschreven in dit proefschrift in financieel ondersteund door de Stichting voor Technische Wetenschappen (STW). All rights ...
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ژورنال
عنوان ژورنال: Proceedings
سال: 2018
ISSN: 2504-3900
DOI: 10.3390/ecsa-5-05858